Webinar: Quantitative EDS Analysis

Abstract

X-ray analysis with SEM/EDS is the most widely used analytical tool for microanalysis. Its strength lies in the fast identification of all elements (Z≥Be) on a micrometer scale. The measured spectra can be quantified with high accuracy, but this requires certain actions from the user. This webinar will focus on the factors affecting the accuracy and precision of EDS analysis:

• Definition of accuracy and precision
• Analysis with or without standards
• Matrix corrections (ZAF vs. φ(ρz))
• Selecting the measurement parameters
• Sample preparation

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Check out also our previous webinar: Webinar 2: Introduction to Broad Ion Beam BIB: A Preparation Tool for Microanalysis