TOF-SIMS

TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectroscopy) is a technique, which combines a high surface sensitivity to a very low detection limits. If equipped with a TOF (Time of Flight) – analyzer, the analysis of sensitive organic materials is possible with high mass resolution. Measured spectra contain elemental (all elements), isotopical and molecular (mass range 0 to ~2000 atomic mass unit) information about the sample. With the technique it is possible to generate image of the lateral distributions of ions at spatial resolutions better than 1 micrometer. 

• Analyzing depth < 2 nm
• Only qualitative analysis (with some exceptions)
• Detection limit ppm – ppb range
• All elements
• Static SIMS- non-destructive analysis
• Dynamic SIMS- Destructive depth profiling
• Lateral resolution 1 micrometer (for metals 120 nm)
• Spectral analysis complicated

Typical applications are 

• Analysis of organic compounds at the surface
• Trace element analysis
• Polymer coatings
• Surface defects