TOF-SIMS
TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectroscopy) is a technique, which combines a high surface sensitivity to a very low detection limits. If equipped with a TOF (Time of Flight) – analyzer, the analysis of sensitive organic materials is possible with high mass resolution. Measured spectra contain elemental (all elements), isotopical and molecular (mass range 0 to ~2000 atomic mass unit) information about the sample. With the technique it is possible to generate image of the lateral distributions of ions at spatial resolutions better than 1 micrometer.
- Analyzing depth < 2 nm
- Only qualitative analysis (with some exceptions)
- Detection limit ppm – ppb range
- All elements
- Static SIMS- non-destructive analysis
- Dynamic SIMS- Destructive depth profiling
- Lateral resolution 1 micrometer (for metals 120 nm)
- Spectral analysis complicated
Typical applications are
- Analysis of organic compounds at the surface
- Trace element analysis
- Polymer coatings
- Surface defects
