TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectroscopy) is a technique, which combines a high surface sensitivity to a very low detection limits. If equipped with a TOF (Time of Flight) - analyzer, the analysis of sensitive organic materials is possible with high mass resolution. Measured spectra contain elemental (all elements), isotopical and molecular (mass range 0 to ~2000 atomic mass unit) information about the sample. With the technique it is possible to generate image of the lateral distributions of ions at spatial resolutions better than 1 micrometer.
Typical applications are