ESCA

ESCA

ESCA (Electron Spectroscopy for Chemical Analysis), also known as XPS (X-ray Photoelectron Spectroscopy), is the energy analysis of photoelectrons generated at the sample surface by x-ray irradiation. The photoelectron spectrum includes characteristic peaks for all elements (except H and He), which can be used to identify the elements qualitatively and quantitatively. Additionally the minor shifts in peak positions give information about the chemical binding state of elements on the surface.

  • Analyzing depth 5-10 nm
  • Semi-quantitative analysis
  • Detection limit 0,1-1 atomic-%
  • Non-destructive depth profiling (about 1- 10 nm) - angle-resolved XPS
  • Destructive depth profiling - Argon sputtering
  • Mapping lateral resolution < 3 micrometer
  • Lateral resolution (i.e. the smallest spot size of analysis) 10 micrometer
  • Information on chemical binding states
  • Spectral analysis straightforward

Typical applications are

  • Quantitative analysis of elements at the surface
  • Thin coatings and multilayers
  • Adhesion properties
  • Corrosion
  • Catalysis